Ni PVD Sputtering Coating Plant, Cr Vacuum Metallizing System, Sn /Ag Vacuum Plating Equipment , Copper Plating Plant

Equipment Structure:

The RTAC1215-SP machine is an octcal type, which consisting of vacuum pumps, vacuum chamber which mounted 8 arc cathodes, 1 linear ion source, 2 sets of DC sputtering cathodes and 1 pair of MF sputtering cathodes. The ion source, sputtering cathodes mounted flanges are standized which can be exchanged flexiblely based on actually coating process's demand.

Applications:

1. DPC industry for Ceramic sealing parts, DPC process, Copper PVD Sputtering system, LED Ceramic Chips With Cooper Plating, Al₂O₃, AlN Ceramic Circuit Boards, Al2O3 Plates On LED, Semiconductor

2. Silver, Ni, Chrome, Gold, Aluminum, In, Sn etc. metal films and TiN, TiAlN, TiC, TiO, CrC, CrCN, CrN etc.

Advantages:

1. Cost-efficient production

2. Humanization of the work station (ergonomic design of the work station,minimizing of space ,noise and danger of accident)

3. High quality yield.

4. Strong adhesion with powerful heating-up device and plasma source cleaning;

5. Compact design and with easy access for upgrading and maintenance work.

6. Fully Automation, PLC+Touch Screen, one-touch control system.

7. High efficiency with less power consumption, max. 50% production cost saving.

Technical Specifications:

• Performance

1. Ultimate Vacuum Pressure: better than 9.0*10^-5 Pa;

• Base Vacuum pressure: 3.0*10^-2 Pa

3. Pumping down Time: from atm to 1.0×10^-3 Pa≤15 minutes ( room temperature, dry, clean and empty chamber)

4. Deposition source: Gencoa magnetron sputtering cathodes, steered arc cathodes, Ion source

5. Operating Model: Full Automatically /Semi-Auto/ Manually

6. Heating: from room temperature up to max. 500℃,

9. Ion source for PECVD and PA PVD process.

• Structure

The vacuum coating machine contains key completed system listed below:

1. Vacuum Chamber
1.1 Size: Inner Diameter: 1200mm

Inner Height: 1500mm

1.2 Material: Vacuum Chamber SUS304

Door and flanges SUS304

Chamber strengthen structure: SS41 mild steel, with painted finishing surface treatment.

Chamber chassis SS41 mild steel with painted finishing surface treatment.

1.3 Chamber Shield : SUS304

1.4 View Window: 2 on door

1.5 Vacuum Chamber Venting Valve (including silencer)

1.6 Door: SUS304 material

2. Roughing Vacuum Pumping System:
Oil rotary vane vacuum pump + Holding Pump

• High Vacuum Pumping System:

Magnetically Suspension Molecular Pump - 2 sets

4. Electrical Control and Operation System- PLC+ Touch ScreenOperation System:

Suppliers:

PLC: Mitsubishi + Touch Screen (Made in China)

Electronic Components: SCHNEIDER,OMRON.

Safety Protecting System: Numerous safety interlocks to protect operators and equipment ( water, current gas, temperature etc.)

Coating Processes System: Process Automation & Control.

4.1 Main circuit: None-fuse breaker switch, electromagnetic switch, C/T in series type

4.2 Power Supply: DC/MF sputtering power + DC Arc power + Bias Power Supply

4.3 Deposition control system

4.4 Operation System: Touch Screen + PLC, recipe control and data logging, Auto shutdown, auto evacuation, auto coating

4.5 Measuring System

Vacuum Pressure : Vacuum Gauge: Pirani + Penning gauge + Full range vacuum gauge -- Europe brand

Temperature measuring device: Thermocouple
MFC: Mass Flow Controller ( 4 ways ),

4.6 Alarm System: Compressed air pressure , Cooling water flow, Mis-operation

4.7 Power Load Indicator: Voltage indicator and load current indicator

5. Deposition System

5.1 Deposition source: Sputtering cathodes+ Arc sources + Ion Source

5.2 Deposition material: Copper, Aluminum, Chrome, Silver, Gold, SS, Titanium etc.

6. Sub-System

6.1 Air Compressed Valve Control System

6.2 Cooling Water System:Water flow pipe and switch valve system

• Working Environment

Compressed Air: 5~8kg/cm2

Cooling Water: Water-In Temperature: 20~25℃, 200 Liter/min,
Water-In Pressure: 2~3 kg/cm2,

Power: 3 Phase 380V 50Hz(60Hz), 130kVA, average power consumption: 60KW

Installation Area: (L*W*H)4400*3200*2950mm

Exhaust: Vent for mechanical pumps

Please contact us for more specifications, Royal Technology support you with total coating solutions.